In situ real-time monitoring of ITO film under chemical etching process using fourier transform electrochemical impedance spectroscopy | |
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Year of publication | 2020 |
Author | Seok Hee Han, Jihun Rho, Sunmi Lee, Moonjoo Kim, Sung Il Kim, Sangmee Park, Woohyuk Jang, Chang Heon Lee, Byoung-Yong Chang*, Taek Dong Chung* |
Journal | Anal. Chem |
Volume | 92 |
Issue | 15 |
Page | 10504-10511 |
Link | https://doi.org/10.1021/acs.analchem.0c01294 373회 연결 |
In Situ Real-time Monitoring of ITO Film under Chemical Etching Process Using Fourier Transform Electrochemical Impedance Spectroscopy |