Direct electrodeposition of thin metal films on functionalized dielectric layer and hydrogen gas sensor | |
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Year of publication | 2017 |
Author | Jin-Young Lee, Samuel Jaeho Shin, Jae Gyeong Lee, Jeongse Yun, Min-A Oh, Taek Dong Chung* |
Journal | J. Electrochem. Soc. |
Volume | 164 |
Issue | 2 |
Page | D1-D5 |
Link | http://doi.org/10.1149/2.0061702jes 454회 연결 |
Harnessing cathodic hydrogen atom generation, metals such as Pt, Pd, Cu, Au and Ni are directly electrodeposited on functionalized dielectric layers of 6 nm thick silicon oxide formed by thermal oxidation of c-Si substrate. For an example of potential applications, we show one-step electrodeposition Pd film on dielectric layers to fabricate conductometric hydrogen gas sensor without transferring Pd film. |