| A new organic modifier for anti-stiction | |
|---|---|
| Year of publication | 2001 |
| Author | Bong Hwan Kim*, Taek Dong Chung, Chang Hoon Oh, Kukjin Chun |
| Journal | J. Microelectromech. Syst. |
| Volume | 10 |
| Issue | 1 |
| Page | 33-40 |
| Link |
http://doi.org/10.1109/84.911089
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