| Amorphous silicon direct bonding (a-SDB) with improved surface roughness | |
|---|---|
| Year of publication | 1998 |
| Author | Bong-Hwan Kim*, Taek Dong Chung, Jong-Won Lee, Yong-Jae Lee, Kukjin Chun |
| Journal | J. Korean Phys. Soc. |
| Volume | 33 |
| Page | s450-s453 |
| Link |
https://www.oocities.org/taekdong/JEAH.pdf
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